Finite Element Analysis of a Mass-Sensitive CMOS-MEMS Resonator using CoventorWare Simulation Software

The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg.