Integration of IC technology with MEMS: Silicon+ technology for the future

Walton, AJ and Stevenson, JTM and Underwood, Ian and Terry, JG and Smith, S and Parkes, William and Dunare, Camelia and Lin, H and Li, Yifan and Henderson, Robert and others (2007) Integration of IC technology with MEMS: Silicon+ technology for the future.

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Item Type:	Article
Depositing User:	Prof. Dr. Tang Tong Boon
Date Deposited:	19 Jun 2023 04:41
Last Modified:	19 Jun 2023 04:41
URI:	http://scholars.utp.edu.my/id/eprint/36606

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