Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems

Walton, AJ and Stevenson, JTM and Underwood, Ian and Terry, JG and Smith, S and Parkes, William and Dunare, Camelia and Lin, H and Li, Yifan and Henderson, Robert and others (2010) Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems. SAIEE Africa Research Journal, 101 (1). pp. 3-10.

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Item Type:	Article
Depositing User:	Prof. Dr. Tang Tong Boon
Date Deposited:	19 Jun 2023 04:19
Last Modified:	19 Jun 2023 04:19
URI:	http://scholars.utp.edu.my/id/eprint/36598

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