Scholarly PublicationGafare, M. and Dennis, J.O. and Md Khir, M.H. (2014) Design and modeling of a CMOS-MEMS capacitive resonator based on bonded-dies for gas detection. In: UNSPECIFIED.
Full text not available from this repository.Abstract
This paper presents a capacitive CMOS-MEMS resonator for mass detection. Mass detection is used in many applications such as chemical industries and biomedical diagnosis. The technique used for this work is two dies bonded in parallel direction to get change in the capacitance whenever there is a change in mass and the device is electro-statically actuated. The resonance frequency of the resonator without polymer layer is found to be 17.195 kHz. The mass sensitivity and gas sensitivity are found to be 3.78 μHz/fg and 26.99 μHz/ppb, respectively. The damping ratio is found to be 1.44 in air due to squeeze film damping. © 2014 IEEE.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Impact Factor: | cited By 1 |
| Uncontrolled Keywords: | Biomedical engineering; Capacitive sensors; Chemical industry; Damping; Microelectromechanical devices, Biomedical diagnosis; bonded-dies; Capacitive resonators; CMOS-MEMS; electrostatically actuation; Mass detection; Resonance frequencies; Squeeze-film damping, Resonators |
| Depositing User: | Ms Sharifah Fahimah Saiyed Yeop |
| Date Deposited: | 29 Mar 2022 04:34 |
| Last Modified: | 29 Mar 2022 04:34 |
| URI: | http://scholars.utp.edu.my/id/eprint/32094 |
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