Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing

Ahmed, M.G.A. and Dennis, J.O. and Khair, M.H.M. and Rabih, A.A.S. and Mian, M.U. (2016) Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing. International Journal of Applied Engineering Research, 11 (6). pp. 4381-4386.

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Item Type:	Article
Impact Factor:	cited By 3
Depositing User:	Ms Sharifah Fahimah Saiyed Yeop
Date Deposited:	23 Aug 2021 14:02
Last Modified:	23 Aug 2021 14:02
URI:	http://scholars.utp.edu.my/id/eprint/24297

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